文献类型：期刊文献

英文题名：Micro-Shaping of Pure Aluminum in Long-Duration Wire Electrochemical Micromachining Using Bipolar Nanosecond Pulses

作者：Bi, Xiaolei[1];Jia, Meng[2];Meng, Lingchao[3,4]

第一作者：Bi, Xiaolei

通讯作者：Bi, XL[1];Jia, M[2]

机构：[1]Henan Inst Technol, Sch Mech Engn, Xinxiang 453003, Peoples R China;[2]Xinxiang Univ, Sch Mech & Elect Engn, Xinxiang 453003, Peoples R China;[3]Northwestern Polytech Univ, Coll Civil Aviat, Xian 710072, Peoples R China;[4]Northwestern Polytech Univ, Yangtze River Delta Res Inst NPU, Taicang 215400, Peoples R China

第一机构：Henan Inst Technol, Sch Mech Engn, Xinxiang 453003, Peoples R China

通讯机构：[1]corresponding author), Henan Inst Technol, Sch Mech Engn, Xinxiang 453003, Peoples R China;[2]corresponding author), Xinxiang Univ, Sch Mech & Elect Engn, Xinxiang 453003, Peoples R China.|[1107111]新乡学院机电工程学院;[11071]新乡学院;

年份：2023

卷号：14

期号：5

外文期刊名：MICROMACHINES

收录：;EI(收录号：20232214176992);Scopus(收录号：2-s2.0-85160620786);WOS:【SCI-EXPANDED(收录号:WOS:000996757000001)】；

基金：This research was supported by the Scientific and Technological Research Projects in Henan Province (222102220038), the Science and Technology Innovation Talents Project of Henan Province (No. 21HAStit021), the Major Science and Technology Project of Xinxiang City (No. 21ZD009), the National Natural Science Foundation of China (No. 52105485), the Key Research and Development Program of Shaanxi Province (No. 2023-YBGY-365), the Fundamental Research Funds for the Central Universities (No. D5000210526), and the Basic Research Programs of Taicang (No. TC2021JC18).

语种：英文

外文关键词：wire electrochemical micromachining; machining accuracy; machining stability; pure aluminum; bipolar nanosecond pulses

摘要：With the increasing application of three-dimensional pure aluminum microstructures in micro-electromechanical systems (MEMS) and for fabricating terahertz components, high-quality micro-shaping of pure aluminum has gradually attracted attention. Recently, high-quality three-dimensional microstructures of pure aluminum with a short machining path have been obtained through wire electrochemical micromachining (WECMM), owing to its sub-micrometer-scale machining precision. However, machining accuracy and stability decrease owing to the adhesion of insoluble products on the surface of the wire electrode in long-duration WECMM, which limits the application of pure aluminum microstructures with a long machining path. In this study, the bipolar nanosecond pulses are used to improve the machining accuracy and stability in long-duration WECMM of pure aluminum. A negative voltage of -0.5 V was considered appropriate based on experimental results. Compared with the traditional WECMM using unipolar pulses, the machining accuracy of the machined micro-slit and the duration of stable machining were significantly improved in long-duration WECMM using bipolar nanosecond pulses.