成果/Result
- Study on high quality polycrystalline silicon p/n films fabrication through recrystallization by RTP被引量：0收藏
- 作者：Zhang, Liwei Mei, Xinli Lu, Jingxiao Zhang, Rui Chu, Shiyong Wen, Shutang
- 机构：Zhengzhou Univ;Zhengzhou Univ;Xinxiang Univ
- 来源：NEW MATERIALS AND PROCESSES, PTS 1-3 2012
- 关键词：Aluminum film Npp plus structure Crystallization
